Metal Pedestal & Heater Assemblies

High-performance pedestal solutions from a world leader in semiconductor chamber technologies

Features & Benefits

In the demanding Semiconductor market, where reliable product performance, high yield and low cost-of-ownership are often backed by competitive cycle-life warranties, Technetics Group pedestals can help you reduce risk and lower costs.

Product Applications

Technetics Group experienced development; design and manufacturing teams combine over 50 years of bellows component knowledge with the newest chamber technologies to create products that exceed your application requirements. PVD, CVD and Etch process systems can be designed for improved yield and longer life because our engineers will work with you to provide design solutions and advanced pedestal coatings that increase reliability, minimize particle generation and improve thermal uniformity.

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