Industry-leading experts in vacuum and abatement in Semiconductor Manufacturing collaborate with Technetics Group to develop efficient solutions that set new standards.
Industry-leading experts in vacuum and abatement in Semiconductor Manufacturing collaborate with Technetics Group to develop efficient solutions that set new standards.
In the Semiconductor industry, vacuum pumps are essential to limiting impurities in the processing chamber. An effective vacuum pump allows for greater process efficiency. However, this technology has far-reaching implications if it does not work correctly.
A vacuum pump manufacturer came to Technetics needing a casing seal for a semiconductor vacuum pump. The seal is necessary to prevent air leakage into the vacuum chamber. Their pump, which is already high-performing thanks to its unique rotor and stator, provides superior vacuum performance. The intelligent design also reduces noise levels, minimizing operator fatigue, and the all-metal construction ensures long-lasting and reliable operation.
However, with a 200°C vacuum casing temperature and a required 10-6 mbar.l/sec leak rate, they were searching for a sealing solution that could meet the lower leak rate and was still high-performing, efficient, reliable, and durable.
Collaborating with the client’s UK Engineering team, the sealing system design for the semiconductor vacuum pump was a success. Through the partnership, they incorporated the Technetics’ seal into the manufacturing process in Korea. The affiliation felt natural because of the trust already established between the companies.
Using the Technetics HELICOFLEX® solution, the client’s pump maintains a consistent vacuum pressure, preventing catastrophic environmental contamination in the chamber. The seal also helps reduce wear and tear on the vacuum pump components, extending the pump’s life.
Once they experienced the efficiency and reliability of our seals through their prototype order, they happily — and eagerly — receive regular manufacturing shipments. With the patented design of the HELICOFLEX® seal, they receive the utmost consistency in their bulk orders.
When considering the long lifetime value of vacuum sealing, we set the industry standard. Our metal seals are innovative, durable, and long-lasting, unlike the average rubber o-ring. Ready to find your sealing solution that will consistently deliver? Contact us today!
The semiconductor manufacturing process requires the use of highly toxic chemicals. The chemical plant providing these chemicals needed a vacuum-tight seal to transport their product to the semiconductor processing location. Click the link below to read how Technetics tackled these challenges and provided the ultimate solution.
The semiconductor manufacturing process requires the use of highly toxic chemicals. The chemical plant providing these chemicals needed a vacuum-tight seal to transport their product to the semiconductor processing location. The chemical container required a vacuum seal with a helium leak tightness seal and positive pressure. Due to the caustic nature of the chemicals, plastic seals are not a consideration.
The HELICOFLEX® DELTA seal was identified as an optimal solution for this application. It incorporates two small ridges, or “Deltas,” on the face of the seal. The high-contact stress in the seal track makes the HELICOFLEX® DELTA seal an excellent choice for ultra-high vacuum applications that require ultra-low Helium leak rates. This solution achieves a 120 deg.C 2barG and helium leak-tight vacuum. The prototype order was received in 2017and testing successfully completed. Technetics continues to supply thousands of precision metal seals yearly to this satisfied customer as the demand for semiconductor processing continues to boom.
Technetics Semi: The CHIPS and Science Act: What it Means for Semiconductor Manufacturing in the U.S. and Globally
The semiconductor industry has seen an explosion since the COVID-19 pandemic began. There is a dramatic demand in the semiconductor chip market. The industry is seeing significant changes in infrastructure.
Technology advances continue to snowball, and it doesn’t appear progress will slow anytime soon.
1. Semiconductors are shrinking in size.
2. Gaming and cell phone improvements contribute to manufacturing changes.
3. Manufacturing companies are outsourcing cleaning services.
Learn why static seals play such a vital role in critical applications, including the space industry. Our Technetics engineers work directly with our customers to create the ideal sealing solution.
Key Takeaways:
Learn about the basics of metal seals and their importance in this training presented by, Technetics Group Design Engineers, Michael Shealy, and Steven Henning, as well as Senior Project Engineer, Jason Adams.
The HELICOFLEX® TEXEAL® texturized seal is a low-load metal seal which allows for the optimization of assemblies at the design phase. It offers uncomplicated installation while achieving a superior sealing level and maintaining performance over time with possibilities of reuse.
A product of the technical collaboration of Technetics Group and the French Atomic Energy Commission (CEA), this innovation allows us to address issues that other metallic solutions couldn’t solve.
Key Takeaways
Presented by Technetics Group, Mechanical Engineers, Frédéric Sauvinet (HELICOFLEX® Seals Product Manager) and Philippe Favre (Nuclear Market Manager)
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