Technetics Improves Vacuum Seal Performance with Innovative Engineering
Industry-leading experts in vacuum and abatement in Semiconductor Manufacturing collaborate with Technetics Group to develop efficient solutions that set new standards.
In the Semiconductor industry, vacuum pumps are essential to limiting impurities in the processing chamber. An effective vacuum pump allows for greater process efficiency. However, this technology has far-reaching implications if it does not work correctly.
A vacuum pump manufacturer came to Technetics needing a casing seal for a semiconductor vacuum pump. The seal is necessary to prevent air leakage into the vacuum chamber. Their pump, which is already high-performing thanks to its unique rotor and stator, provides superior vacuum performance. The intelligent design also reduces noise levels, minimizing operator fatigue, and the all-metal construction ensures long-lasting and reliable operation.
However, with a 200°C vacuum casing temperature and a required 10-6 mbar.l/sec leak rate, they were searching for a sealing solution that could meet the lower leak rate and was still high-performing, efficient, reliable, and durable.